X-ray fluorescence spectroscopy ? layer thickness determina

Продукт No: P2545201


X-ray fluorescence analysis (XRF) is suitable for the non-contact and non-destructive thickness measurement of thin layers as well as for determining their chemical composition. For this type of measurement, the X-ray source and detector are located on the same side of the sample. When the layer on the substrate is subjected to X-rays, the radiation will penetrate the layer, if it is sufficiently thin, to a certain extent, depending on the thickness, and in turn cause characteristic fluorescence radiation in the material of the underlying substrate. On its way to the detector, this fluorescence radiation will be attenuated by absorption at the layer. The thickness of the layer can be determined based on the intensity attenuation of the fluorescence radiation of the substrate material.


  1. Calibrate the semiconductor energy detector.
  2. Measure fluorescence spectrum of the iron substrate with different numbers n of pieces of aluminium foil with the same thickness placed on the substrate (including n = 0). Determine the intensity of the Fe-Kα fluorescence line.
  3. Plot the intensity of the Fe-Kα fluorescence line as a function of the number of pieces of aluminium foil placed on the substrate in linear and semilogarithmic way.
  4. Determine the intensity of the Fe-Kα fluorescence line for various numbers of pieces of aluminium foil that are fastened in front of the outlet of the tube of the energy detector.
  5. Calculate the thickness of the aluminium foil.
  6. Execute tasks 2 to 4 for copper foil on molybdenum or zinc substrate.

What you can learn about

  • Bremsstrahlung
  • characteristic X-radiation
  • fluorescent yield
  • Auger effect
  • coherent and incoherent photon scattering
  • law of absorption
  • mass attenuation coefficient
  • saturation thickness
  • matrix effects
  • semiconductor
  • energy detectors
  • multi-channel analysers

Перечень материалов (вы́писка) Продукт Количество
XR 4.0 expert unit, X-ray unit, 35 kV 09057-99 1
XR 4.0 X-ray energy detector (XRED) 09058-30 1
XR 4.0 X-ray plug-in unit W tube 09057-81 1
XR 4.0 X-ray goniometer 09057-10 1
PHYWE Multichannel Analyser (MCA) 13727-99 1
XR 4.0 X-ray specimen set of 6 metals for X-ray fluorescence 09058-31 1
XR 4.0 X-ray specimen set metals for fluorescence, set of 4 09058-34 1
XR 4.0 XRED cable, 2 m 09058-35 1
measure Software multi channel analyser 14452-61 1
XR 4.0 X-ray Universal crystal holder for X-ray unit 09058-02 1
XR 4.0 X-ray Diaphragm tube d = 1 mm 09057-01 1
XR 4.0 X-ray Diaphragm tube d = 2 mm 09057-02 1
Screened cable, BNC, l = 750 mm 07542-11 1

Литература по данной статье

Название Продукт Язык
Handbuch Lehrerversuche mit Röntgenstrahlung für die XR 4.0 expert unit, TESS expert Physik 01200-01 DEU
TESS expert Physics Handbook X-ray Experiments for XR 4.0 expert unit 01200-02 ENG
XRM 4.0 X-ray Materialanalyse Erweiterungsset 09160-88

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Продукт No: P2545201

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